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Even as we tentatively enter the nanotechnology era, we are now encountering the 50th anniversary of the invention of the IC. Will silicon continue to be the pre-eminent material and will Moores Law continue unabated, albeit in a broader economic venue, in the nanotechnology era? This monograph addresses these issues by a re-examination of the scientific and technological foundations of the micro-electronics era. It also features two visionary articles of Nobel laureates.
Even as we enter the nanotechnology era, we are now encountering the 50th anniversary of the invention of the IC. Will silicon continue to be the pre-eminent material and will MooreTMs Law continue unabated, albeit in a broader economic venue, in the nanotechnology era? This monograph addresses these issues by a re-examination of the scientific and technological foundations of the micro-electronics era. By better assessing and understanding the past five decades of this era, it is proposed that a firmer foundation can be laid for the research that will ensue and possibly provide a glimpse of what is next to come in the nanotechnology era.
Historical Background.- Silicon: Child and Progenitor of Revolution.- The Economic Implications of Moores Law.- State-of-the-Art.- Using Silicon to Understand Silicon.- Theory of Defects in Si: Past, Present, and Challenges.- Structural, Elemental, and Chemical Complex Defects in Silicon and Their Impact on Silicon Devices.- Surface and Interface Chemistry for Gate Stacks on Silicon.- Enhanced Carrier Mobility for Improved CMOS Performance.- Transistor Scaling to the Limit.- Future Directions.- Beyond CMOS Electronics: Self-Assembled Nanostructures.- Hybrid CMOS/Molecular Integrated Circuits.- Sublithographic Architecture: Shifting the Responsibility for Perfection.- Quantum Computing.- Afterwords.- Nano-Whatever: Do We Really Know Where We Are Heading?.- Silicon Forever! Really?.As we enter thló&
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