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Introduction To Focused Ion Beam Nanometrology [Paperback]

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Category: Books (Technology & Engineering)
Author: David C. Cox
Author: David C. Cox
ISBN-10: 1681740206
ISBN-10: 1681740206
ISBN-13: 9781681740201
ISBN-13: 9781681740201
Publisher: Morgan & Claypool Publishers
Publisher: Morgan & Claypool Publishers
Pages: 84
Pages: 84
Binding: Paperback
Binding: Paperback
Pub Date: 01-Jun-2015
Pub Date: 01-Jun-2015
SKU: 1681740206-11-MPOD
SKU: 1681740206-11-MPOD
Item ID: 100809461

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This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology.