Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology [Hardcover]

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM.

• Covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications
• Explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM
• Describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT)

1. Introduction 2. Electrochemical Machining: Macro to Micro 3. Principle of Material Removal in EMM 4. Types of EMM 5. Electrochemical Micromachining (EMM) Setup 6. Design and Development of Micro Tools 7. Influencing Factors of EMM 8. Improvement of Machining Accuracy 9. Advantages, Applications and Limitations of EMM 10. Micro-Features Fabrication for MEMS and lƒ°