Laser Microfabrication Thin Film Processes and Lithography [Hardcover]

This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.Technology. Y.S. Liu, Sources, Optics, and Laser Microfabrication Systems for Direct Writing and Projection Lithography. Fundamentals. T.J. Chuang, Laser-Stimulated Molecular Processes on Surfaces. M. Rothschild, Spectroscopy and Photochemistry of Gases, Adsorbates, and Liquids. C.I.H. Ashby and J.Y. Tsao, Photophysics and Thermophysics of Light Absorption and Energy Transport in Solids. H.J. Zeiger, D.J. Ehrlich, and J.Y. Tsao, Transport and Kinetics. Reactions. J.J. Ritsko, Laser Etching. R.L. Jackson, T.H. Baum, T.T. Kodas, D.J. Ehrlich, and P.B. Comita, Laser Deposition: Energetics and Chemical Kinetics. J. Haigh and M.R. Aylett, Laser Deposition: Experimental Approaches. S.J.C. Irvine, Epitaxy. I.W. Boyd, Doping and Oxidation. Index.A good balance between science and practice, well-established and very new data....The importance of this monograph lies in the title itself, since microelectronics today is a driving force of progress in science and technology....I think that anyone who wants to understand this field of practical laser chemistry should have a copy. It is also useful to study because it raises many new questions about elementary laser-induced reactions on surfaces and thereby stimulates progress in the field.
--VLADILEN S. LETOKHOV, PROFESSOR AND HEAD OF DEPARTMENT, INSTITUTE OF SPECTROSCOPY OF USSR ACADEMY OF SCIENCES, TROITZK. IN OPTICS AND PHOTONICS NEWS.
Laser Microfabrication' is an impressive volume detailing the expanding field of laser-assisted patterned chemical processing of surfaces. This volume would be a valuable addition to the library of any researcher in laser-assistelC*