Micromechanics and MEMS Classic and Seminal Papers to 1990 [Paperback]

Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer.Acknowledgments and Dedication.

Introduction.

Comments on Writing an Article.

EARLY PAPERS IN MICROMECHANICS.

There's Plenty of Room at the Bottom (R. Feynman).

Infinitesimal Machinery (R. Feynman).

The Resonant Gate Transistor (H. Nathanson, et al.).

Silicon Micromechanical Devices (J. Angell, et al.).

Anisotropic Etching of Silicon (K. Bean).

Silicon as a Mechanical Materials (K. Petersen).

Microrobots and Micromechanical Systems (W. Trimmer).

Small Machines, Large Opportunities (K. Gabriel, et al.).

SIDE DRIVE ACTUATORS.

IC-Processed Electrostatic Micro-Motors (L.-S. Fan, et al.).

IC-Processed Micro-Motors: Design, Technology, and Testing (Y.-C. Tai, et al.).

Surface-Micromachining Processes for Electrostatic Microactuator Fabrication (T. Lober and R. Howe).

A Study of Three Microfabricated Variable-Capacitance Motors (M. Mehregany, et al.).

Friction and Wear in Microfabricated Harmonic Side-Drive Motors (M. Mehregany, et al.).

Measurements of Electric Micromotor DynamiclC;