Nanoelectromechanical Systems [Hardcover]

This book will present the theoretical and technological elements of nanosystems. Among the different topics discussed, the authors include the electromechanical properties of NEMS, the scaling effects that give these their interesting properties for different applications and the current manufacturing processes. The authors aim to provide useful tools for future readers and will provide an accurate picture of current and future research in the field.

PREFACE vii

PHYSICAL CONSTANTS ix

NOTATIONS xi

CHAPTER 1. FROM MEMS TO NEMS 1

1.1. Micro- and nanoelectromechanical systems: an overview 1

1.2. Conclusion 9

CHAPTER 2. TRANSDUCTION ON THE NANOMETRIC SCALE AND THE NOTION OF NOISE 13

2.1. Mechanical transfer function 14

2.2. Transduction principles 20

2.2.1. The actuation of nanostructures 23

2.2.2. Detection 31

2.3. Self-oscillation and noises 49

2.4. Conclusion 58

CHAPTER 3. MONOLITHIC INTEGRATION OF NEMS WITH THEIR READOUT ELECTRONICS 61

3.1. Foreword 61

3.1.1. Why integrate NEMS with their readout electronics? 61

3.1.2. What are the differences between MEMS-CMOS and NEMS-CMOS? 62

3.2. The advantages of and main approaches to monolithic integration 64

3.2.1. A comparison of integration schemes and their electrical performance 64

3.2.2. Closed-loop NEMS-CMOS oscillators: the essential building block for NEMS-based frequency sensors 69

3.2.3. Overview of the main achievements from the perspective of manufacturing technology 70

3.3. Analysis oflS%