An introduction to RHEED for beginners plus detailed experimental and theoretical treatments for experts.Reflection high-energy electron diffraction is one of the most powerful tools used in surface structural analysis to monitor epitaxial growth. This book serves as an introduction to RHEED for beginners and describes detailed experimental and theoretical treatments for experts. First the principles of electron diffraction and many examples of RHEED patterns are described for beginners. The second part contains detailed descriptions of RHEED theory. Finally, applications of RHEED are explained with many examples.Reflection high-energy electron diffraction is one of the most powerful tools used in surface structural analysis to monitor epitaxial growth. This book serves as an introduction to RHEED for beginners and describes detailed experimental and theoretical treatments for experts. First the principles of electron diffraction and many examples of RHEED patterns are described for beginners. The second part contains detailed descriptions of RHEED theory. Finally, applications of RHEED are explained with many examples.Reflection high-energy electron diffraction is one of the most powerful tools used in surface structural analysis to monitor epitaxial growth. This book serves as an introduction to RHEED for beginners and details experimental and theoretical treatments for experts. First, the principles of electron diffraction are explained, with many examples of RHEED patterns described for beginners. The second part contains in-depth descriptions of RHEED theory. Finally, applications of RHEED are explained with many examples.Preface; 1. Introduction; 2. Historical survey; 3. Instrumentation; 4. Wave properties of electrons; 5. The diffraction conditions; 6. Geometrical features of the patterns; 7. Kikuchi and resonance patterns; 8. Real diffraction patterns; 9. Electron scattering by atoms; 10. Kinematic electron diffraction; 11. Fourier components of the crystal³#