Thin Film Materials Stress, Defect Formation and Surface Evolution [Hardcover]

This graduate textbook provides a comprehensive coverage of the mechanical properties of thin films, with practical examples and homework problems.Thin films play an important role in many technological applications which include: microelectronic devices, magnetic storage media and surface coatings. This book provides a comprehensive coverage of the major issues and topics dealing with stress, defect formation and surface evolution in thin films. Of particular interest to engineers, materials scientists and physicists, it provides a balanced coverage of theory, experiment and simulation. Highly illustrated and containing numerous homework problems, this book will be essential reading on senior undergraduate and graduate courses on thin films.Thin films play an important role in many technological applications which include: microelectronic devices, magnetic storage media and surface coatings. This book provides a comprehensive coverage of the major issues and topics dealing with stress, defect formation and surface evolution in thin films. Of particular interest to engineers, materials scientists and physicists, it provides a balanced coverage of theory, experiment and simulation. Highly illustrated and containing numerous homework problems, this book will be essential reading on senior undergraduate and graduate courses on thin films.This book provides comprehensive coverage of stress, defect formation and surface evolution in thin films. With its balanced coverage of theory, experiment and simulation and many homework problems, the text will be essential reading in senior undergraduate and graduate courses on thin films.1. Introduction and overview; 2. Film stress and substrate curvature; 3. Stress in anisotropic and patterned films; 4. Delamination and fracture; 5. Film buckling, bulging and peeling; 6. Dislocation formation in epitaxial systems; 7. Dislocation interactions and strain relaxation; 8. Equilibrium and stability of surfaces; 9. The role of stress in l@